Polysiloxane Thin Films Optimisation for Potassium Detection using EIS Characterisation with Microelectrode Structures

B. Torbiéro, J. Launay, A. Benyahia, A. Martinez, P. Temple-Boyer
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Abstract

Most chemical or biochemical analysis use current-voltage I(V) characterization as detection principle. Thus, the development of microelectrodes using standard silicon technologies process is required: they show advantages of mass production, generic structure, small dimensions, low cost, and are well adapted for the detection of chemical, biochemical or biological species in aqueous environment using specific impedimetric measurement methods.
微电极结构EIS表征聚硅氧烷薄膜钾离子检测优化研究
大多数化学或生化分析使用电流-电压I(V)表征作为检测原理。因此,需要使用标准硅技术工艺开发微电极:它们具有批量生产,结构通用,尺寸小,成本低的优点,并且非常适合使用特定的阻抗测量方法检测水环境中的化学,生化或生物物种。
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