XRD study of gas sensitive SnO/sub 2/ thin films deposited by spray pyrolysis method

Abstract

The results ofresearch of SnO2 thin film structure using XRD difhction is presented in this report. We discuss the influence of conditions of film deposition and modes of heat treatment m the range of temperatures 400-900°C on crystallite size and predominant orientation. It was determined that SnOz 5 h s , deposited by spray pyrolysis method, are textured polyaystalline films with nano-size aystal€ites (Hl-20 run). Predominant orientatkm of crystallites ((1 10) or (200)). forming the gas sensitive surface, depends on film thickness and used modes of deposition. We also have shown that the structure of studied Sn02 films was very stable in oxygen atmosphere.