Extended short wavelength spectral response from InGaAs focal plane arrays

Abstract

InGaAs detector material used in near infrared focal plane arrays (NIR FPAs) has typically been limited in spectral response to a range from approximately 900 nm to 1700 nm. Through special processing techniques, the spectral response can be extended down through the visible spectrum and into the ultraviolet. Test results showing preliminary spectral response from 350nm to 1700 nm, responsivity, sensitivity, corrected uniformity and simultaneous imaging of NIR and visible signals will be presented along with a discussion of anticipated applications for this new sensor technology.