E. Reichmanis, A. Novembre, R. Tarascon, A. Shugard, L. F. Thompson
{"title":"Organosilicon polymers for microlithographic applications","authors":"E. Reichmanis, A. Novembre, R. Tarascon, A. Shugard, L. F. Thompson","doi":"10.1021/ba-1990-0224.ch016","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":245674,"journal":{"name":"Advances in chemistry series","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advances in chemistry series","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1021/ba-1990-0224.ch016","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
京公网安备 11010802042870号
求助内容：
应助结果提醒方式：
