A novel squeezed-film damping model for MEMS comb structures

A. Sinding, A. Parent, I. Ocak, W. Syed, A. Chatterjee, C. Welham, Shuangqin Liu, Jun Yan, S. Breit, Hyun-Kee Chang, I. Elfadel, Z. Sbiaa
{"title":"A novel squeezed-film damping model for MEMS comb structures","authors":"A. Sinding, A. Parent, I. Ocak, W. Syed, A. Chatterjee, C. Welham, Shuangqin Liu, Jun Yan, S. Breit, Hyun-Kee Chang, I. Elfadel, Z. Sbiaa","doi":"10.1109/TRANSDUCERS.2017.7994487","DOIUrl":null,"url":null,"abstract":"We present the implementation and validation of a novel model for simulating comb squeezed-film damping. The model is computationally efficient regardless of finger count and optionally includes top and bottom encapsulation surfaces surrounding the fingers. Comparison with standard numerical simulation shows a difference in damping coefficient of less than 1%. One application is to predict the Q factors of resonant MEMS such as gyroscopes for which a high Q-factor ensures stable oscillations and certain magnetometers for which it amplifies the sensitivity. The model is validated against experimental Q factors of a magnetometer, predicted values are within 10% of measurement from 0.01MPa to 100Pa.","PeriodicalId":174774,"journal":{"name":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2017.7994487","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3

Abstract

We present the implementation and validation of a novel model for simulating comb squeezed-film damping. The model is computationally efficient regardless of finger count and optionally includes top and bottom encapsulation surfaces surrounding the fingers. Comparison with standard numerical simulation shows a difference in damping coefficient of less than 1%. One application is to predict the Q factors of resonant MEMS such as gyroscopes for which a high Q-factor ensures stable oscillations and certain magnetometers for which it amplifies the sensitivity. The model is validated against experimental Q factors of a magnetometer, predicted values are within 10% of measurement from 0.01MPa to 100Pa.
一种新的MEMS梳状结构压缩膜阻尼模型
我们提出了一个模拟梳状挤压膜阻尼的新模型的实现和验证。无论手指数量如何,该模型都具有计算效率,并且可选地包括围绕手指的顶部和底部封装面。与标准数值模拟相比,阻尼系数的差异小于1%。一个应用是预测谐振MEMS的Q因子,如陀螺仪,高Q因子可以确保稳定的振荡,某些磁力计可以放大灵敏度。用某磁力计的实验Q因子对模型进行了验证,在0.01MPa ~ 100Pa范围内,预测值与实测值相差在10%以内。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信