A study of subthreshold behavior of short-channel junctionless cylindrical surrounding-gate MOSFETs from an electrostatic potential viewpoint

Chunsheng Jiang, R. Liang, Jing Wang, Jun Xu
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引用次数: 1

Abstract

An analytical electrostatic potential model for Junctionless Cylindrical Surrounding-Gate (JLCSG) MOSFETs was developed by solving the 2-D Poisson equation based on a method of series expansion similar to Green's function. Subthreshold behavior was studied in detail by changing different device parameters and bias conditions, including doping concentration, channel thickness, gate length, gate oxide thickness, drain voltage, and gate voltage. The calculated results of the analytical models are consistent with those of a 3-D numerical simulator without any fitting parameters for various device parameters and bias conditions. This analytical model can be used to investigate the operating mechanisms of nanoscale JLCSG MOSFETs and to optimize their device performance.
从静电电位的角度研究短沟道无结圆柱形围栅mosfet的亚阈值行为
采用类似格林函数的级数展开方法,求解二维泊松方程,建立了无结圆柱围栅(JLCSG) mosfet静电势解析模型。通过改变不同的器件参数和偏置条件,包括掺杂浓度、沟道厚度、栅极长度、栅极氧化物厚度、漏极电压和栅极电压,详细研究了亚阈值行为。对各种器件参数和偏置条件,解析模型的计算结果与没有任何拟合参数的三维数值模拟器的计算结果一致。该分析模型可用于研究纳米级JLCSG mosfet的工作机制并优化其器件性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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