X-ray transmission characteristics measurement of a polycapillary lens installed in an analytical electron microscope

2014 IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC) Pub Date : 2014-11-01 DOI:10.1109/NSSMIC.2014.7431068

A. Takano, K. Maehata, N. Iyomoto, T. Hara, K. Mitsuda, N. Yamasaki, Keiichi Tanaka

{"title":"X-ray transmission characteristics measurement of a polycapillary lens installed in an analytical electron microscope","authors":"A. Takano, K. Maehata, N. Iyomoto, T. Hara, K. Mitsuda, N. Yamasaki, Keiichi Tanaka","doi":"10.1109/NSSMIC.2014.7431068","DOIUrl":null,"url":null,"abstract":"An energy dispersive spectrometer with a superconducting transition edge sensor (TES) microcalorimeter mounted on a transmission electron microscope (TEM) has been developed to improve the accuracy of nanoscale material analysis. TES microcalorimeters generally have a sensitive surface area on the order of 100 × 100 μm2. Furthermore, because of the magnetic field generated by the TEM objective lens, a TES microcalorimeter cannot be placed in a TEM column. Therefore, a polycapillary lens is used for collecting X-rays emitted by a TEM specimen on the TES microcalorimeter. The X-ray transmission characteristics of the polycapillary lens typically depend on the geometrical arrangements of the optics and the X-ray energy. Energy spectrum measurements were carried out for X-rays transmitted by a polycapillary lens installed in a TEM for evaluating X-ray transmission characteristics of the optics. Values of the focal spot size and the intensity gain were obtained by analyzing the experimental energy spectra in the energy range of 1.0-14.0 keV.","PeriodicalId":144711,"journal":{"name":"2014 IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NSSMIC.2014.7431068","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

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Abstract

An energy dispersive spectrometer with a superconducting transition edge sensor (TES) microcalorimeter mounted on a transmission electron microscope (TEM) has been developed to improve the accuracy of nanoscale material analysis. TES microcalorimeters generally have a sensitive surface area on the order of 100 × 100 μm2. Furthermore, because of the magnetic field generated by the TEM objective lens, a TES microcalorimeter cannot be placed in a TEM column. Therefore, a polycapillary lens is used for collecting X-rays emitted by a TEM specimen on the TES microcalorimeter. The X-ray transmission characteristics of the polycapillary lens typically depend on the geometrical arrangements of the optics and the X-ray energy. Energy spectrum measurements were carried out for X-rays transmitted by a polycapillary lens installed in a TEM for evaluating X-ray transmission characteristics of the optics. Values of the focal spot size and the intensity gain were obtained by analyzing the experimental energy spectra in the energy range of 1.0-14.0 keV.

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安装在分析电子显微镜中的多毛细透镜的x射线透射特性测量

为了提高纳米材料分析的精度，研制了一种安装在透射电子显微镜(TEM)上的超导跃迁边缘传感器(TES)微热计的能量色散光谱仪。TES微量热计的敏感表面积一般在100 × 100 μm2左右。此外，由于TEM物镜产生的磁场，TES微量热计不能放置在TEM柱中。因此，在TES微量热计上使用多毛细透镜来收集TEM样品发出的x射线。多毛细透镜的x射线传输特性通常取决于光学元件的几何排列和x射线能量。对安装在TEM中的多毛细透镜传输的x射线进行能谱测量，以评估光学元件的x射线传输特性。通过分析1.0 ~ 14.0 keV能量范围内的实验能谱，得到了焦斑尺寸和强度增益的数值。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2014 IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC)

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