Change in optical properties of sapphire substrates by co-implantation of high-energy Zn and O ions

S. Nakao, M. Ikeyama, T. Mizota, H. Niwa, K. Saitoh, Y. Miyagawa, S. Miyagawa, M. Tazawa, Ping Jin
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Abstract

Ion implantation technique is a convenient way to form nano-particles into host materials. Moreover, there is a possibility to form oxide compound nano-particles by way of co-implantation of metal and oxygen ions. However, there are few reports on the formation of metal oxide nano-particles by way of co-implantation. On the other hand, ZnO is a semiconductor materials with wide and direct band gap, and their nano-crystals have attracted much attention because they could be applicable for optical devices showing blue luminescence. Moreover, it is known that ZnO films can be grown epitaxially on sapphire substrates. By analogy, it is presumably considered that ZnO nano-particles are also grown with orientation relation of sapphire substrates. The aim of this study is to form ZnO nano-particles by way of coimplantation of Zn and O ions into host materials. In this experiments, for the first attempt, Zn and O ions were co-implanted into sapphire substrates, and the change in their optical properties were examined.
高能Zn和O离子共注入对蓝宝石衬底光学性能的影响
离子注入技术是一种方便的将纳米粒子注入宿主材料的方法。此外,还可以通过金属离子和氧离子的共注入形成氧化物复合纳米粒子。然而,用共注入的方法制备金属氧化物纳米颗粒的报道很少。另一方面,ZnO是一种具有宽而直接带隙的半导体材料,其纳米晶体因可用于蓝色发光的光学器件而备受关注。此外,已知ZnO薄膜可以在蓝宝石衬底上外延生长。以此类推,可以认为ZnO纳米粒子的生长也与蓝宝石衬底的取向关系有关。本研究的目的是通过将Zn和O离子共注入到主体材料中来形成ZnO纳米粒子。本实验首次将Zn和O离子共注入蓝宝石衬底,考察了其光学性质的变化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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