MIM and MIS electret response of laser deposited Sr/sub x/Ba/sub 1-x/Nb/sub 2/O/sub 6/ thin films

Abstract

The pulsed laser deposition technique has been applied to synthesize Sr/sub x/Ba/sub 1-x/Nb/sub 2/O/sub 6/ (SBN: x=0.5) thin films. The polycrystalline phase of SBN films can be obtained only when the substrate temperature was higher than 680/spl deg/C. The crystalline texture can be modified when the oxygen pressure was varied. Both metal-insulator-metal (MIM) and metal-insulator-semiconductor (MIS) structures of films possess ferroelectric properties. Diffusive phase-transition characteristics of dielectric constant-temperature properties indicate that the SBN films possess a pyroelectric property. SBN films, therefore, have potential for electret research and application.