Fingertip sized external cavity quantum cascade laser based on MEMS grating

A. Sugiyama, T. Ochiai, Kyosuke Nagasaka, T. Dougakiuchi, T. Edamura, N. Akikusa
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Abstract

The extremely compact external cavity quantum cascade laser was realized with the MEMS grating. MEMS gratings with various resonant frequencies enabled two types of tunable and swept modes. The characteristics is shown, and we provide spectroscopy demonstration data.
基于MEMS光栅的指尖外腔量子级联激光器
利用MEMS光栅实现了超紧凑的外腔量子级联激光器。具有不同谐振频率的MEMS光栅可实现两种类型的可调谐和扫频模式。给出了其特性,并提供了光谱验证数据。
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