A. Sugiyama, T. Ochiai, Kyosuke Nagasaka, T. Dougakiuchi, T. Edamura, N. Akikusa
{"title":"Fingertip sized external cavity quantum cascade laser based on MEMS grating","authors":"A. Sugiyama, T. Ochiai, Kyosuke Nagasaka, T. Dougakiuchi, T. Edamura, N. Akikusa","doi":"10.23919/ISLC52947.2022.9943420","DOIUrl":null,"url":null,"abstract":"The extremely compact external cavity quantum cascade laser was realized with the MEMS grating. MEMS gratings with various resonant frequencies enabled two types of tunable and swept modes. The characteristics is shown, and we provide spectroscopy demonstration data.","PeriodicalId":443954,"journal":{"name":"2022 28th International Semiconductor Laser Conference (ISLC)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 28th International Semiconductor Laser Conference (ISLC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/ISLC52947.2022.9943420","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The extremely compact external cavity quantum cascade laser was realized with the MEMS grating. MEMS gratings with various resonant frequencies enabled two types of tunable and swept modes. The characteristics is shown, and we provide spectroscopy demonstration data.