High precision optical angle measuring method applicable in standard CMOS technology

Abstract

In this paper a new concept for high precision angle measurement in standard CMOS technology is presented. In comparison to previous works, the complexness of the sensor topology is strongly reduced, the measuring range and the accuracy are significantly increased. The wavelength and the light intensity have a negligible influence on the accuracy of the sensor. In contrast to the previous concept, where SOI technology is mandatory, this new sensor concept can also be realised using standard CMOS technology.