Influence of the nanometer thick interface layer to electrical properties of the 10 nm doped metal oxide high k dielectrics

Y. Kuo, J. Lu, P.C. Liu, F.M. Daby, J. Tewg
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引用次数: 6

Abstract

The 2 nm interface films formed between the 10 nm thin Hf- and Zr-doped tantalum oxide high k films and Si wafer were studied. Physical and chemical properties of the interface layer were investigated with respect to the bulk film preparation conditions. The interface layer properties do not influence the high k film's leakage current but affect the dielectric constant drastically.
纳米厚界面层对10nm掺杂金属氧化物高k介电材料电性能的影响
研究了10 nm掺Hf和zr的氧化钽高k薄膜与硅片之间形成的2 nm界面膜。根据体膜制备条件,研究了界面层的物理化学性质。界面层性质对高k薄膜的漏电流影响不大,但对介电常数影响较大。
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