Applications of nanoimprinting technique in photonic devices

Abstract

Nanoimprinting is an emerging nanolithography technique, which not only has the ability to pattern nanoscale features, but also is compatible with polymer material processing. Based on these characteristics, we have extended nanoimprinting to two new applications in polymer based photonic and optoelectronic devices, namely polymer microring waveguide device and pixelated polymer light emitting diodes. Fabrication details for both types of devices are described.