An analog perspective on device reliability in 32nm high-κ metal gate technology

F. Chouard, S. More, M. Fulde, D. Schmitt-Landsiedel
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引用次数: 9

Abstract

An assessment on analog circuit reliability for an advanced 32nm high-κ metal gate technology is given from the analog designer's point of view. Selected analog circuit blocks are investigated with respect to device stress states. A custom test structure, designed to reveal analog related device characteristics including relaxation effects, was used to perform stress measurements. In addition to common aging in inversion mode, degradation in accumulation mode is determined. Experiments reveal that relaxation shows a large variety in drift behavior, and degradation induced variations - even for analog size devices - can reach significant values. Both topics are main issues for analog circuits design. Thereupon a general approach to consider device aging for analog circuit reliability is proposed.
32nm高κ金属栅极技术器件可靠性的模拟分析
从模拟设计人员的角度对一种先进的32nm高κ金属栅极技术的模拟电路可靠性进行了评估。选定的模拟电路块研究了器件的应力状态。一个定制的测试结构,旨在揭示模拟相关的设备特性,包括松弛效应,被用来进行应力测量。除了反演模式下常见的老化外,还确定了积累模式下的退化。实验表明,弛豫在漂移行为中表现出很大的变化,并且退化引起的变化-即使对于模拟尺寸的器件-也可以达到显著的值。这两个主题都是模拟电路设计的主要问题。在此基础上,提出了一种考虑器件老化影响模拟电路可靠性的通用方法。
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