Simulation of nano-scale double gate In0.53Ga0.47As nMOSFETs by a deterministic BTE solver

Abstract

A nano-scale double gate In0.53Ga0.47As nMOSFET device structure is simulated by deterministically solving the time dependent Boltzmann Transport Equation (BTE). The results show that the contribution of the L valleys cannot be ignored even if the energy gap between r and L valleys are very large. Moreover, the quasi-ballistic transport is observed despite the existence of scattering.