Design of a Three Degree of Freedom Nanopositioning Stage

Abstract

A new type of simple and compact three degree of freedom parallel large-travel nano-piezoelectric stage is designed. First, a two-stage rhombus displacement amplifying mechanism is designed as the drive unit of the platform, and a spatially orthogonal arrangement is adopted. Then, based on four drive units with the same structure and located at the four corners of the base, a z-θx-θy stage with large displacement is designed. Finally, the static performance of the platform is tested by finite element simulation. The result shows that the travel of the platform along the z, θx and θy directions are 226.7 µm, 2.53 mrad and 2.56 mrad, respectively, and the natural frequencies are 251.81 Hz, 261.46 Hz and 261.46 Hz, respectively.