CMOS-Compatible Gas Sensors

L. Filipovic, S. Selberherr
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引用次数: 2

Abstract

As transistor scaling along Moore's law approaches its physical limits, the semiconductor industry has been intensely working on functional integration of devices along the More-than-Moore approach. The integration of sensors, RF circuits, and other functionalities with electronics is enabled by innovations in packaging, three-dimensional integration, and most importantly through the fabrication of multiple components and features on silicon using established technology. With the application of semiconductor metal oxide (SMO) thin films, there is potential for the integration of gas sensors with processing electronics. This manuscript describes SMO gas sensors, their fabrication, and operating techniques which require high temperatures and therefore an integrated microheater. Microheaters require the fabrication of a membrane in order to isolate the high temperature component from other circuitry. Finally, the manuscript looks at recent achievements in engineering of SMO films and in understanding and modeling their sensing mechanism.
cmos兼容气体传感器
随着晶体管按照摩尔定律的缩放接近其物理极限,半导体行业一直在紧锣密密地按照“超越摩尔”(More-than-Moore)的方法研究器件的功能集成。传感器、射频电路和其他电子功能的集成是通过封装、三维集成的创新实现的,最重要的是通过使用现有技术在硅上制造多个组件和功能。随着半导体金属氧化物(SMO)薄膜的应用,气体传感器与加工电子器件的集成具有潜力。这份手稿描述了SMO气体传感器,他们的制造和操作技术,需要高温,因此一个集成的微加热器。微加热器需要制造一层膜,以便将高温元件与其他电路隔离开来。最后,该手稿着眼于SMO薄膜工程的最新成就,以及对其传感机制的理解和建模。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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