{"title":"CMOS-Compatible Gas Sensors","authors":"L. Filipovic, S. Selberherr","doi":"10.1109/MIEL.2019.8889585","DOIUrl":null,"url":null,"abstract":"As transistor scaling along Moore's law approaches its physical limits, the semiconductor industry has been intensely working on functional integration of devices along the More-than-Moore approach. The integration of sensors, RF circuits, and other functionalities with electronics is enabled by innovations in packaging, three-dimensional integration, and most importantly through the fabrication of multiple components and features on silicon using established technology. With the application of semiconductor metal oxide (SMO) thin films, there is potential for the integration of gas sensors with processing electronics. This manuscript describes SMO gas sensors, their fabrication, and operating techniques which require high temperatures and therefore an integrated microheater. Microheaters require the fabrication of a membrane in order to isolate the high temperature component from other circuitry. Finally, the manuscript looks at recent achievements in engineering of SMO films and in understanding and modeling their sensing mechanism.","PeriodicalId":391606,"journal":{"name":"2019 IEEE 31st International Conference on Microelectronics (MIEL)","volume":"2015 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE 31st International Conference on Microelectronics (MIEL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MIEL.2019.8889585","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
As transistor scaling along Moore's law approaches its physical limits, the semiconductor industry has been intensely working on functional integration of devices along the More-than-Moore approach. The integration of sensors, RF circuits, and other functionalities with electronics is enabled by innovations in packaging, three-dimensional integration, and most importantly through the fabrication of multiple components and features on silicon using established technology. With the application of semiconductor metal oxide (SMO) thin films, there is potential for the integration of gas sensors with processing electronics. This manuscript describes SMO gas sensors, their fabrication, and operating techniques which require high temperatures and therefore an integrated microheater. Microheaters require the fabrication of a membrane in order to isolate the high temperature component from other circuitry. Finally, the manuscript looks at recent achievements in engineering of SMO films and in understanding and modeling their sensing mechanism.