Equipment Comparison Analysis using ANOVA of FDC Statistics

Abstract

In case of specific equipment in fleet has a problem, we applied ANOVA (Analysis of Variance) of FDC (Fault Detection and Classification) statistics data to extract the problem related sensors. And using the statistics trend and link analysis with various process data we successfully reached root cause of the problem. In this paper we demonstrate how to solve the problem that frequent stage heater disconnection in a Metal-CVD equipment.