Investigation of Aberration for Optical System in Integral Stereolithography System

Xu Guang-shen, Jin Jing, L. Sheng, Yang Jian
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Abstract

Optical imaging system is a key component for dynamic pattern generator in integral Stereolithography (SL) system, and the performance of the optical imaging system influences building accuracy and resolution of the integral SL system. The larger the aberration of the optical imaging system, the larger the dimension errors of objects built with the integral SL system, and larger aberration will make it impossible for the integral SL system to fabricate small objects with micro/meso structures. In order to assure the integral SL system has enough ability to build small object with micro/meso structures, the optical imaging system is established, and the aberration of the optical imaging system is investigated with ZEMAX. The optical imaging system consists of two components. The component 1 consists of 3 positive lenses, and the component 2 is made up of a negative lens, two positive lenses and a aperture. Aberrations analysis results shows that there are some residual spherical aberrations, off-axis spherical aberration and coma, and sagittal coma is larger than the meridional coma. The largest coma value of the optical imaging system is 0.08mm, and the average dispersion spot size is 0.04mm, and. The maximum astigmatism is 0.2 mm and the maximum field curvature is 1.4mm, the maximum distortion is less than 2%. The resolution is 0.05mm. Aberrations analysis results indicate that the performance of the optical imaging system can meet the requirements of the integral SL system.
整体立体光刻系统光学系统像差的研究
光学成像系统是整体立体光刻系统中动态图案发生器的关键部件,光学成像系统的性能直接影响到整体立体光刻系统的构建精度和分辨率。光学成像系统的像差越大,使用积分SL系统构建的物体尺寸误差也越大,而像差越大,积分SL系统就无法制造具有微/介观结构的小物体。为了保证整体SL系统有足够的能力构建具有微/介观结构的小物体,建立了光学成像系统,并利用ZEMAX对光学成像系统的像差进行了研究。光学成像系统由两部分组成。组件1由3个正透镜组成,组件2由一个负透镜、两个正透镜和一个光圈组成。像差分析结果表明,存在一定的残余球差、离轴球差和彗差,矢状彗差大于经向彗差。光学成像系统的最大彗差值为0.08mm,平均色散斑尺寸为0.04mm。最大像散为0.2 mm,最大场曲率为1.4mm,最大畸变小于2%。分辨率为0.05mm。像差分析结果表明,该光学成像系统的性能能够满足整体式SL系统的要求。
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