Design and analysis of a novel flexure-based XY micro-positioning stage driven by electromagnetic actuators

Shunli Xiao, Yangmin Li, Xinhua Zhao
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引用次数: 32

Abstract

The paper presents the design and analysis of a novel compliant flexure-based totally decoupled XY micro-positioning stage which is driven by electromagnetic actuators. The stage is constructed with a very simple structure by employing double parallelogram flexures and four contactless electromagnetic force actuators. The kinematics and dynamic modeling of the mechanical system of the stage are conducted by resorting to compliance and stiffness analysis based on matrix method, and analytical models for electromagnetic forces are also established, both mechanical structure and electromagnetic model are validated by finite element analysis(FEA) via AN-SYS. The mechanical structure is analyzed in a multi-physics environmental simulation and electromagnetic actuators are applied in ANSYS too. Both FEA and the analytical models well demonstrate that the movement of the stage is totally decoupled. With the parameters given in the paper, the moving range can reach 1mm × 1mm and the resolution can reach 0.1 μm at least, which is mainly limited by the displacement sensor's accuracy in our laboratory.
一种新型电磁驱动柔性XY微定位平台的设计与分析
设计并分析了一种基于柔性的电磁驱动全解耦XY微定位平台。舞台结构简单,采用双平行四边形挠体和四个非接触式电磁力执行器。采用基于矩阵法的柔度和刚度分析对舞台机械系统进行了运动学和动力学建模,建立了电磁力解析模型,并通过AN-SYS软件对机械结构和电磁模型进行了有限元分析验证。在多物理场环境仿真中对机械结构进行了分析,并在ANSYS中应用了电磁作动器。有限元分析和解析模型都很好地证明了平台的运动是完全解耦的。在本文给出的参数下,移动范围可以达到1mm × 1mm,分辨率至少可以达到0.1 μm,这主要受限于我们实验室中位移传感器的精度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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