Modeling of silicon MEMS capacitive pressure sensor for biomédical applications

Abstract

This paper presents the Modeling of Silicon capacitive pressure sensor for biomédical applications. Using the Micro Electro Mechanical Systems (MEMS) technology, MEMS sensors are widely used in biomédical applications due to its advantages of miniaturization, low power consumption, easy to measurement and telemetry. This work demonstrates the design of MEMS based capacitive pressure sensor using finite element method (FEM). We will study the deflection of a fine membrane of silicon (100) of circular form to the perfectly embedded at its edges, under uniform and constant pressure. The capacitive response of the sensor obtained is linear in the range of pressure of 0-40KPa (0-300mmHg) with better sensitivity.