Fundamentals Of Wafer Fab Automation The Forth Generation CIM FA

Abstract

The large scale wafer requires more precise process control, feedback/feed forward for the productivity than ever. CIM FA (Computer Integrated Manufacturing Factory Automation) will be a fundamental solution to future semiconductor manufacturing. In this paper, I would like to discuss about what CIM FA should be for semiconductor manufacturing, and would introduce CIM FA plant where we are now operating 200mm manufacturing.