Monolithic integration of continuous-relief diffractive structures with vertical-cavity surface-emitting lasers

IEEE 18th International Semiconductor Laser Conference Pub Date : 2002-12-10 DOI:10.1109/ISLC.2002.1041123

M. Karlsson, F. Nikolajeff, H. Martinsson, A. Larsson

引用次数: 3

Abstract

In this work, we have studied the transfer of diffractive optical elements, originally made in resist, into GaAs for monolithic integration with vertical-cavity surface-emitting laser.

查看原文本刊更多论文

连续浮雕衍射结构与垂直腔面发射激光器的整体集成

在这项工作中，我们研究了衍射光学元件的转移，原来是在抗蚀剂，到GaAs与垂直腔面发射激光器的单片集成。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

IEEE 18th International Semiconductor Laser Conference

自引率

0.00%

发文量