{"title":"Testing philosophy behind the micro analysis system","authors":"H. Kerkhoff","doi":"10.1117/12.341224","DOIUrl":null,"url":null,"abstract":"Microsystem testing has to cope with many problems, resulting from inaccessibility, different technologies and non-electrical failure modes. Possible test techniques have been investigated to test a new advanced microsystem. The implementation form and application area highly contributes to the choices made.","PeriodicalId":318748,"journal":{"name":"Design, Test, Integration, and Packaging of MEMS/MOEMS","volume":"54 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"22","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Design, Test, Integration, and Packaging of MEMS/MOEMS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.341224","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 22
Abstract
Microsystem testing has to cope with many problems, resulting from inaccessibility, different technologies and non-electrical failure modes. Possible test techniques have been investigated to test a new advanced microsystem. The implementation form and application area highly contributes to the choices made.