High accuracy machine automated assembly for opto electronics

G. Lecarpentier, J. Mottet, J. Dumas, K. Cooper
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引用次数: 8

Abstract

One of the major alignment challenges faced by assembly engineers today is the accurate assembly of high-end optoelectronic modules. Silicon optical platform applications, where a laser diode is aligned to a single mode fiber or an optical waveguide, require post-bonding alignments better than 1 micron for optimum device performance. Flip Chip technology has proven its ability to cope with such stringent alignment requirements. Several bonding methods have been investigated, ranging from active alignment of a powered device to various forms of passive self-aligned soldering methods employing one or more mechanical stops. Though these methods have demonstrated some good results, the active alignment method incurs substantial cost of assembly time, while some self-aligning methods carry the disadvantage of requiring additional process steps during chip and substrate fabrication, as well as generating more sporadic alignment results under typical manufacturing variations. A passive alignment approach is proposed, where the mechanical alignment, placement and joining burdens are bourne by a flip chip bonder. Differing substantially from pick and place machines available on the market today, this new flip chip bonder has been specifically aimed at the special requirements of the optoelectronic module market, and is capable of performing in-situ gold-tin eutectic bonding to 1 micron accuracy. The design and application of this bonder to this assembly process is reviewed, with special notice given to optical, thermal and environmental requirements.
用于光电器件的高精度机器自动化装配
当今装配工程师面临的主要校准挑战之一是高端光电模块的精确装配。硅光学平台应用,其中激光二极管对准单模光纤或光波导,要求键合后对准优于1微米,以获得最佳器件性能。倒装芯片技术已经证明了其应对如此严格的校准要求的能力。已经研究了几种键合方法,范围从动力装置的主动对准到采用一个或多个机械止点的各种形式的被动自对准焊接方法。虽然这些方法已经显示出一些良好的结果,但主动对准方法会产生大量的组装时间成本,而一些自对准方法的缺点是在芯片和衬底制造过程中需要额外的工艺步骤,并且在典型的制造变化下产生更多的零星对准结果。提出了一种被动对准方法,其中机械对准,放置和连接负担由倒装芯片键合机承担。与目前市场上可用的拾取和放置机器有很大不同,这种新的倒装芯片键合机专门针对光电模块市场的特殊要求,能够执行精确到1微米的原位金-锡共晶键合。对该粘结剂在该装配过程中的设计和应用进行了审查,并特别注意光学、热学和环境要求。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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