UTBB FDSOI scaling enablers for the 10nm node

2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) Pub Date : 2013-10-01 DOI:10.1109/S3S.2013.6716546

L. Grenouillet, Q. Liu, R. Wacquez, P. Morin, N. Loubet, D. Cooper, A. Pofelski, W. Weng, F. Bauman, M. Gribelyuk, Y. Wang, B. De Salvo, J. Gimbert, K. Cheng, Y. Le Tiec, D. Chanemougame, E. Augendre, S. Maitrejean, A. Khakifirooz, J. Kuss, R. Schulz, C. Janicki, B. Lherron, S. Guillaumet, O. Rozeau, F. Chafik, J. Bataillon, T. Wu, W. Kleemeier, M. Celik, O. Faynot, R. Sampson, B. Doris, M. Vinet

引用次数: 31

Abstract

UTBB FDSOI technology is a faster, cooler and simpler technology addressing the performance/energy consumption trade-off. In this paper we present the main front-end-of-the-line knobs to scale down this promising technology to the 10nm node.

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用于10nm节点的UTBB FDSOI缩放使能器

UTBB FDSOI技术是一种更快，更冷，更简单的技术，解决了性能/能耗的权衡。在本文中，我们提出了将这一有前途的技术缩小到10nm节点的主要前端旋钮。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)

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