Packaging aspects of CVD diamond in high performance electronics requiring enhanced thermal management

R. Petkie, P. Santini
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引用次数: 4

Abstract

The application of CVD diamond substrates has increased in recent years due to lower manufacturing costs of CVD diamond and an increased demand for high performance heat spreaders in thermal management. The materials and packaging aspects specific to diamond substrates and the most recent applications are discussed. Topics include thin and thick film metallization schemes, via filling, die attach, flange materials, brazing, and thermal performance. Materials processing, such as brazing and screen printing, are discussed in terms of compatibility and cost. Some metallization schemes to diamond, for example, have proven to be very robust in terms of temperature, time, and reducing gas ambient for lead attach, while screen printing reduces manufacturing costs. Optimization of die attach adhesion while minimizing thermal resistance is addressed and a comparison of BeO and CVD diamond packages in terms of thermal management is illustrated with temperature color maps.
封装方面的CVD金刚石在高性能电子需要加强热管理
近年来,由于CVD金刚石的制造成本较低以及热管理中对高性能散热器的需求增加,CVD金刚石衬底的应用有所增加。讨论了金刚石衬底的材料和封装方面以及最新的应用。主题包括薄膜和厚膜金属化方案,通过填充,模具连接,法兰材料,钎焊和热性能。材料加工,如钎焊和丝网印刷,讨论了兼容性和成本。例如,一些金刚石金属化方案已被证明在温度、时间和减少铅附着的气体环境方面非常稳定,而丝网印刷则降低了制造成本。在最小化热阻的同时,优化了模具附着力,并用温度色图说明了BeO和CVD金刚石封装在热管理方面的比较。
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