M. A. Rodini, C. Thiago, I. Pereyra, K. F. Albertin
{"title":"Hydrogen sensors with TiO2 nanotubes","authors":"M. A. Rodini, C. Thiago, I. Pereyra, K. F. Albertin","doi":"10.1109/SBMICRO.2014.6940084","DOIUrl":null,"url":null,"abstract":"Hydrogen sensors, intending to operate at low temperatures (around 25°C), based on TiO2 nanotube arrays were fabricated and characterized in N2/H2 atmosphere with different nitrogen concentrations. The nanotube arrays were obtained through Ti anodic oxidation in a NH4F in ethylene glycol (0, 5 % in weight) and 2 % H2O bath, magnetically stirred at room temperature. The TiO2 nanotube hydrogen sensors were characterized at room temperature with hydrogen concentration varying from 50 to 4000 ppm. A linear conductance variation between 50 and 500 ppm was observed. This result is very attractive for hydrogen sensors where low operation temperatures are needed, for example, in medical applications.","PeriodicalId":244987,"journal":{"name":"2014 29th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 29th Symposium on Microelectronics Technology and Devices (SBMicro)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SBMICRO.2014.6940084","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Hydrogen sensors, intending to operate at low temperatures (around 25°C), based on TiO2 nanotube arrays were fabricated and characterized in N2/H2 atmosphere with different nitrogen concentrations. The nanotube arrays were obtained through Ti anodic oxidation in a NH4F in ethylene glycol (0, 5 % in weight) and 2 % H2O bath, magnetically stirred at room temperature. The TiO2 nanotube hydrogen sensors were characterized at room temperature with hydrogen concentration varying from 50 to 4000 ppm. A linear conductance variation between 50 and 500 ppm was observed. This result is very attractive for hydrogen sensors where low operation temperatures are needed, for example, in medical applications.