Progress in high-power femtosecond excimer lasers

Abstract

In view of the recent advances in femtosecond solid-state technology, highpower solid-state laser systems are regarded as superior light sources over excimer-based short-wavelength systems. Based on the well-developed high-energy amplifier technology and using the so-called Chirped-Pulse-Amplification (CPA) technique, peak powers of several tens of TW have been reached.