Fabrication of 3D a-Si/SiO/sub 2/-photonic crystals on 2D sub-micron-patterned InP substrates

Abstract

We have fabricated three-dimensional (3D) periodic structures consisting of stacked a-Si/SiO/sub 2/ layers directly on two-dimensional (2D) sub-micron-patterned [100]-InP substrates by using autocloning technology. The initial 2D pattern has been reflected in the 3D periodic structures whose height has been amplified. We have measured the transmission and reflection spectra of the 3D periodic structures, and have observed the photonic band gaps in the wavelength region of around 1400 to 2200 nm. We have also observed strong polarization dependency for the samples with the triangular lattice and weak dependency for those of the square case.