Automated isostatic lamination of green sheets in multilayer electric components

Abstract

Isostatic (hydraulic) pressing with a warm temperature has laminated ceramics green sheets in multilayer electric components such as IC packages, capacitors, etc. in more uniform and higher density than other methods such as mechanical presses. This results in higher throughput because the deviated or low density of laminated green sheets may cause delamination and uneven shrinkage in the sintering process. Isostatic pressing, however, has two problems due to the wet bag process. 1. Vapor generation - during heating up, binder and plasticizer in the sheets inside a bag are vaporized and the vapor is collected in the bag which may aggravate the uniformity of the laminating pressure on the sheets. 2. Automation - the operation may not be fully automated due to the handling of a wet bag. This paper introduces the essential solution for these two remaining problems.