Tuning forks in silicon

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI:10.1109/MEMSYS.1989.77968

R. Buser, N. D. de Rooij

引用次数: 17

Abstract

The authors describe microfabricated tuning forks in silicon, which are excited electrodynamically. The pressure dependence of the resonance frequency and the Q-factor was measured by an interferometer over a range of pressure 1 mu bar to 2 bar. It is shown that micromachined structures in silicon have Q-factors which are comparable to those of similar quartz structures.<>

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硅质音叉

作者描述了在硅中采用电动力激励的微加工音叉。用干涉仪在1 μ bar ~ 2 μ bar的压力范围内测量了谐振频率与q因子的压力依赖性。结果表明，硅中的微加工结构具有与类似石英结构相当的q因子。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'

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