Integrated micro-optical assemblies for optical interconnects

Abstract

Integrated micro-optical systems (IMOS) are integrated assemblies of multiple optical components that are made and assembled at the wafer level using semiconductor processing techniques. IMOS has been used to create 3-dimensional optical systems in a cost-effective highly manufacturable manner. Collimated lens arrays have been fabricated with experimental total round trip insertion loss of 1.5-2.0 dB per channel.