Thermal flow sensor for liquids and gases

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI:10.1109/MEMSYS.1998.659781

M. Ashauer, H. Glosch, F. Hedrich, N. Hey, H. Sandmaier, W. Lang

引用次数: 58

Abstract

A new type of a flow sensor is presented which is based on a thermal principle. The combination of two detecting methods results both in a considerable increase in measuring range (0.1 to 150 mm/s) and in a shorter reaction time of less than 2 ms. Furthermore, the sensor is furthermore relatively insensitive to pollution. Devices were manufactured and successfully tested for liquids and gases.

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液体和气体热流传感器

提出了一种基于热学原理的新型流量传感器。两种检测方法的结合导致测量范围(0.1至150mm /s)的显著增加和小于2ms的较短反应时间。此外，该传感器对污染相对不敏感。装置被制造出来，并成功地测试了液体和气体。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176

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