T. Akyol, J. Yum, D. Ferrer, M. Lei, M. Downer, C. Bielawski, T. Hudnall, G. Bersuker, J.C. Lee, S. Banerjee
{"title":"Introduction of ALD Beryllium oxide gate dielectric for III–V MOS devices","authors":"T. Akyol, J. Yum, D. Ferrer, M. Lei, M. Downer, C. Bielawski, T. Hudnall, G. Bersuker, J.C. Lee, S. Banerjee","doi":"10.1109/DRC.2011.5994448","DOIUrl":null,"url":null,"abstract":"Using atomic layer deposited (ALD) Beryllium oxide (BeO) as a gate dielectric for the first time, we present improved surface channel MOSFETs on III–V substrates. We used a self-aligned gate-last process to fabricate MOSFETs on semi-insulating InP substrates with TaN gate electrode. The electrical characteristics of n-MOSFETs and MOS-Capacitors and physical characteristics of the BeO high-κ dielectric film were investigated and are summarized in this paper. BeO gate dielectric n-MOSFETs show excellent surface channel dc output characteristics, supporting high possibility of utilizing it in III–V CMOS technology.","PeriodicalId":107059,"journal":{"name":"69th Device Research Conference","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2011-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"69th Device Research Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DRC.2011.5994448","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Using atomic layer deposited (ALD) Beryllium oxide (BeO) as a gate dielectric for the first time, we present improved surface channel MOSFETs on III–V substrates. We used a self-aligned gate-last process to fabricate MOSFETs on semi-insulating InP substrates with TaN gate electrode. The electrical characteristics of n-MOSFETs and MOS-Capacitors and physical characteristics of the BeO high-κ dielectric film were investigated and are summarized in this paper. BeO gate dielectric n-MOSFETs show excellent surface channel dc output characteristics, supporting high possibility of utilizing it in III–V CMOS technology.