Statistical machine control: a practical approach to total productive maintenance of semiconductor equipment

Abstract

Statistical Machine Control (SMC) encompasses the total maintenance effect on equipment. This approach steps far beyond the "fix it" attitude that has often been the understood job of a maintenance technician. SMC incorporates Total Quality Management (TQM) practices, the predictive and preventive maintenance programs. The goal of the program is to maximize uptime while continuing: to reduce variation. Variation has an effect on product yields, and equipment can be a major cause of the total variation in a factory. SMC addresses these concerns, and it requires a change in mind set that takes time, training and a lot of energy to bring to fruition. SMC works if the organization is committed to overcome the stumbling blocks along the way. This paper is illustrated with four practical examples.