The linearisation of an electrostrictive device for MEMS applications

Abstract

A control system which utilises analogue electronics has previously been designed to successfully transform an electrostatic actuator, with inherently nonlinear behaviour, into a linear actuator. It is intended that this control system can be applied to electrostrictive actuators, which respond in the same way to the square of the applied electric field. This controller also enables the use of an automated dc bias field to extend the actuation range, whilst still maintaining linear behaviour. This control system is applied to electrostrictive thin films (PMN) deposited on beams to linearly drive them for vibration control and micropositioning of probes, such as in scanning probe microscopy.