Glove-shaped wearable device using flexible MEMS sensor

Abstract

An ultrathin Si MEMS piezoresistive strain sensor was used to fabricate a glove-shaped wearable device that can be used in VR and surgical assistance. In this paper, we proposed a mounting structure that reduces strain concentration at the connection between the sensor and the wiring. The proposed mounting structure was able to withstand strains of up to 66.9%. With this structure, we succeeded in measuring the bending motion of fingers with the constructed wearable device.