Low-dark current p-on-n MCT detector in long and very long-wavelength infrared

Abstract

This paper presents recent developments done at CEA-LETI Infrared Laboratory on processing and characterization of p-on-n HgCdTe (MCT) planar infrared focal plane arrays (FPAs) in LWIR and VLWIR spectral bands. These FPAs have been grown using liquid phase epitaxy (LPE) on a lattice matched CdZnTe substrate. This technology presents lower dark current and lower serial resistance in comparison with n-on-p vacancy doped architecture and is well adapted for low flux detection or high operating temperature. This architecture has been evaluated for space applications in LWIR and VLWIR spectral bands with cutoff wavelengths from 10μμm up to 17μm at 78K. Innovations have been introduced to the technological process to form a heterojunction with a LPE growth technique. The aim was to lower dark current at low temperature, by decreasing currents from the depletion region. Electro-optical characterizations on p-on-n photodiodes have been performed on QVGA format FPAs with 30μm pixel pitches. Results show excellent operabilities in current and responsivity, with low dispersion and noise limited by current shot-noise. Studies performed on dark current show that dark current densities are consistent with the heuristic prediction law "Rule07" at 78K. Below this temperature, dark current varies as a pure diffusion current.