Interfacial Roughness and Interdiffusion Derived from a Comparison of the Measured and Calculated Reflectances of Mo/Si Multilayer Coatings

Abstract

Mo/Si multilayer coatings were fabricated at LLNL and were characterized using the Grating/Crystal Monochromator and Reflectometer attached to the Naval Research Laboratory beamline X24C at the National Synchrotron Light Source. The reflectances were measured at several angles of incidence and for both s and p polarizations. The measured reflectances were compared to calculations that included the effects of interdiffusion layers and of roughness at each interface and that were based on Henke's optical constants.