E. Oilier, C. Chabrol, T. Enot, P. Brunet-Manquat, J. Margail, P. Mottier
{"title":"1/spl times/8 micro-mechanical switches based on moving waveguides for optical fiber network switching","authors":"E. Oilier, C. Chabrol, T. Enot, P. Brunet-Manquat, J. Margail, P. Mottier","doi":"10.1109/OMEMS.2000.879616","DOIUrl":null,"url":null,"abstract":"The feasibility of 1/spl times/N switches based on moving waveguides has been demonstrated. Solutions have been developed to overcome the technological hurdles encountered. The elementary 1/spl times/2 switch performances have been strongly improved: very low crosstalk (<-42 dB), low optical losses (1.5 dB), insensitivity to wavelength (<0.2 dB, 1250-1650 nm wavelength range) and polarisation (<0.3 dB), low driving voltage (<70 V), low switching time (<5 ms). Due to the results associated with a size reduction and a very accurate and reproducible control of residual deflection, we have demonstrated that the fabrication of larger 1/spl times/N switches is possible by cascading 1/spl times/2 switches. 1/spl times/8 switches have been fabricated. Moreover an 8/spl times/8 switching matrix has been demonstrated using arrays of 1/spl times/8 switches. These demonstrations show that this technology can address the different switching applications.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879616","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 10
Abstract
The feasibility of 1/spl times/N switches based on moving waveguides has been demonstrated. Solutions have been developed to overcome the technological hurdles encountered. The elementary 1/spl times/2 switch performances have been strongly improved: very low crosstalk (<-42 dB), low optical losses (1.5 dB), insensitivity to wavelength (<0.2 dB, 1250-1650 nm wavelength range) and polarisation (<0.3 dB), low driving voltage (<70 V), low switching time (<5 ms). Due to the results associated with a size reduction and a very accurate and reproducible control of residual deflection, we have demonstrated that the fabrication of larger 1/spl times/N switches is possible by cascading 1/spl times/2 switches. 1/spl times/8 switches have been fabricated. Moreover an 8/spl times/8 switching matrix has been demonstrated using arrays of 1/spl times/8 switches. These demonstrations show that this technology can address the different switching applications.