Improvement of drop shock and TC reliability for large die Wafer Level Packages in mobile application

Jun-Kyu Lee, Yun-Mook Park, I. Kang, Yong-min Kwon, K. Paik
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引用次数: 7

Abstract

In this study, board level drop shock and TC reliabilities in terms of solder materials and UBM(Under Bump Metallurgy) structures have been evaluated to suggest optimal structures of WLP(Wafer level Packaging) with the large die, high pin counts for mobile application. Test vehicles of WLP have been designed with 5.6×5.6mm die size, 340 um thickness (including backside protection film), 14×14 ball array, 400 um ball pitch. Firstly, effect of solder ball composition has been investigated through BLR(Board Level Reliability) tests using electroplated Cu UBM with which solder compositions are SAC305, SAC125-0.05Ni, SAC105, Sn0.7Cu respectively. Secondly, effect of UBM structure has been confirmed under SAC305 ball composition, with which UBM structures are Cu UBM, Ni base-UBM, and direct ball attaching without UBM. Additionally, effect of dielectric materials and thickness for the reliability has been investigated. For the condition of BLR tests, drop tests have been performed under JEDEC Condition B (1500G, 0.5millisecond duration, half-sin pulse), as listed JESD22-B110. Resistance variation was observed by in-situ electrical monitoring during drop test. In case of TC test, the condition was −45~125 D, 2cph (cycles per hour), and resistances of daisy chain were measured every 100cycles. Lifetime statistics for WLP with each design and factors have been compared through the Weibull plot for cumulative failure rate after TC and drop shock tests, respectively. Also, the observation of fracture mode through cross-section analysis and FEM simulation for the thermo-mechanical fatigue has been conducted to define the failure mechanism for each reliability test.
提高移动应用中大晶圆级封装的跌落冲击和TC可靠性
在本研究中,根据焊料材料和UBM(碰撞冶金)结构,对板级跌落冲击和TC可靠性进行了评估,以建议具有大模具,高引脚数的WLP(晶圆级封装)的最佳结构,用于移动应用。WLP试验车的模具尺寸为5.6×5.6mm,厚度为340 um(含背面保护膜),球阵为14×14,球距为400 um。首先,采用电镀Cu UBM,分别以SAC305、SAC125-0.05Ni、SAC105、Sn0.7Cu为钎料成分,通过BLR(Board Level Reliability)试验研究了钎料成分对钎料球可靠性的影响。其次,在SAC305球成分下,证实了UBM结构的作用,其中UBM结构有Cu -UBM、Ni - base-UBM和不含UBM的直接贴球。此外,还研究了介质材料和厚度对可靠性的影响。对于BLR试验条件,在JEDEC条件B (1500G, 0.5毫秒持续时间,半正弦脉冲)下进行跌落试验,如JESD22-B110所示。通过现场电监测,观察了跌落试验过程中电阻的变化情况。TC试验条件为−45~125 D, 2cph(循环/ h),雏菊链电阻每100循环测量一次。通过威布尔图分别比较了在TC和跌落冲击试验后WLP的累积故障率。通过热-机械疲劳的截面分析和有限元模拟对断裂模式进行观察,确定各可靠性试验的失效机理。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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