Reliability Tests and Stress in Plastic Integrated Circuits

W. Schroen, James L. Spencer, John A. Bryan, Robert D. Cleveland, Terry D. Metzgar, D. Edwards
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引用次数: 26

Abstract

Temperature cycling and pressure cooker environmental tests were performed on integrated strain gauge and metal test structures. Test bars were packaged in different plastic encapsulation materials and under different packaging procedures. For temperature cycling, dramatic differences in build-up and relief of internal stress in silicon bars were found as a function of the packaging conditions selected. Packaging conditions also affected the performance of test structures and actual circuits in pressure cooker. Conclusions for plastic IC reliability are reached, as illustrated by an innovative test structure for simultaneous measurement of stress, leakage and corrosion. In conclusion, modular reliability test bars are discussed in relation to the strategy for reliability prediction.
塑料集成电路的可靠性测试和应力
对综合应变片和金属试验结构进行了温度循环和高压锅环境试验。试验棒采用不同的塑料封装材料和不同的包装工艺进行包装。对于温度循环,在硅棒内部应力的积累和缓解的巨大差异被发现作为一个功能的包装条件选择。封装条件对测试结构和实际电路的性能也有影响。通过同时测量应力、泄漏和腐蚀的创新测试结构,得出了塑性集成电路可靠性的结论。最后,讨论了模块化可靠性试验杆与可靠性预测策略的关系。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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