Laser beam shaping for micromaterial processing using a liquid crystal display

SPIE MOEMS-MEMS Pub Date : 2008-02-07 DOI:10.1117/12.763542
U. Klug, M. Boyle, F. Friederich, R. Kling, A. Ostendorf
{"title":"Laser beam shaping for micromaterial processing using a liquid crystal display","authors":"U. Klug, M. Boyle, F. Friederich, R. Kling, A. Ostendorf","doi":"10.1117/12.763542","DOIUrl":null,"url":null,"abstract":"The high demand for beam shaping technology by the display industry has lead to higher resolutions, smaller pixel pitch and reduced costs. Nowadays high quality, nematic Liquid Crystal on Silicon microdisplays (LCoS) with resolutions of 1920 × 1080 pixels and 8 μm pixel pitch are available. The optical properties of these microdisplays allow for their application as an adaptive optical element where instantaneous change between arbitrary beam profiles is necessary. Laser material processing which often requires high beam qualities with various beam profiles is one industry where this technology could be applied. In this paper, a compact beam shaping setup and simple characterization methods for practical use of the LCoS at micromachining stations are presented.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE MOEMS-MEMS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.763542","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6

Abstract

The high demand for beam shaping technology by the display industry has lead to higher resolutions, smaller pixel pitch and reduced costs. Nowadays high quality, nematic Liquid Crystal on Silicon microdisplays (LCoS) with resolutions of 1920 × 1080 pixels and 8 μm pixel pitch are available. The optical properties of these microdisplays allow for their application as an adaptive optical element where instantaneous change between arbitrary beam profiles is necessary. Laser material processing which often requires high beam qualities with various beam profiles is one industry where this technology could be applied. In this paper, a compact beam shaping setup and simple characterization methods for practical use of the LCoS at micromachining stations are presented.
用液晶显示器加工微材料的激光束整形
显示行业对光束整形技术的高需求导致了更高的分辨率、更小的像素间距和更低的成本。目前,高质量的向列液晶硅微显示器(LCoS)的分辨率为1920 × 1080像素,像素间距为8 μm。这些微显示器的光学特性允许它们作为自适应光学元件的应用,其中任意光束轮廓之间的瞬时变化是必要的。激光材料加工通常需要具有各种光束轮廓的高光束质量,这是该技术可以应用的一个行业。本文提出了一种紧凑的光束整形装置和简单的表征方法,用于微加工台站的lco的实际应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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