Novel planar structure single-RF drive MZ optical modulator on InP(110) substrate

Abstract

A MZ optical modulator (MZM) with a novel planar structure was proposed. A single-RF drive push-pull MZM with a simple coplanar waveguide (CPW) was fabricated by utilizing a (110)-oriented InP substrate in terms of the crystallographic orientation dependence of the electro-optic Pockels effect. The device exhibits a 3 dB-EO bandwidth of 30 GHz and 40 Gb/s NRZ high speed modulation.