Degradation Characteristics of High-Voltage AlGaN/GaN-on-Si Heterostructure FETs under DC Stress

Shinhyuk Choi, Jae-Gil Lee, H. Yoon, H. Cha, Hyungtak Kim
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Abstract

We have fabricated field-plated AlGaN/GaN Heterostructure Field Effect Transistors(HFETs) on Si substrate for high voltage operation and submitted the devices to the DC stress tests to investigate the degradation phenomena. The devices were stressed under two different types of bias configuration including on-state with high current and off-state with low current. Several degradation characteristics such as the reduction of on-current, the increase of gate leakage, and the decrease of transconductance were identified. The degradation showed the moderate dependence on the field plate dimensional parameters and TCAD simulation indicated that this dependence was attributed to the electric field distribution in the channel.
高压AlGaN/GaN-on-Si异质结构场效应管在直流应力下的降解特性
我们在Si衬底上制备了场镀AlGaN/GaN异质结构场效应晶体管(hfet),用于高压工作,并进行了直流应力测试,研究了器件的退化现象。在两种不同类型的偏置配置下,包括大电流导通状态和小电流关断状态。发现了导通电流减小、栅漏增大、跨导减小等退化特性。性能的下降与场板尺寸参数有一定的关系,TCAD仿真表明这种关系与通道内的电场分布有关。
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