High Temperature Operating Lifetime Test on piezo-MEMS devices

Abstract

Microelectromechanical systems (MEMS) are among the most significant applications of piezoelectric materials. Piezoelectric thin films are used both for sensing and actuating even if their high efficiency in actuation allowed to develop challenging solutions in the field of MEMS mirrors. MEMS mirrors market has grown very fast in last decades covering many applications such as pico-projectors and LiDAR. The increase of ST customers for this application has been translated into a large products portfolio for consumer's market. The requirement is the technology validation together with the device design. Therefore, the analysis of suitable reliability tests to ensure competitive performances for each product over stress and time is mandatory. In this manuscript we focus on a two-steps stress test developed by AMS R&D team. The aim is the analysis of the stress effects onto sol-gel PZT micro-mirrors to gain comprehension about the reliability of our products under practical usage.