Laser machining of silicon for fabrication of new microstructures

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers Pub Date : 1991-06-24 DOI:10.1109/SENSOR.1991.148925

M. Alavi, S. Buttgenbach, A. Schumacher, H. Wagner

引用次数: 20

Abstract

A method for fabrication of new types of microstructures with high aspect ratio is described. This technique is based on the local destruction of limiting

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用于制造新型微结构的硅的激光加工

介绍了一种新型高纵横比微结构的制备方法。这种技术是基于局部破坏的极限

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

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