Tip scanning dynamic SFM using piezoelectric cantilever for full wafer inspection

Abstract

The dynamic scanning force microscope (DSFM) has proven itself as a versatile instrument for science and technology. It has made possible the measurement of surface structures with sizes ranging from a single atom to several micrometers. But practically, the samples to be inspected are often too big to fit the SFM sample stage of traditional SFM systems. In this report, we propose a new structure of DSFM compatible with full wafer inspection.