Toward growth of wafer-scale single-crystal hexagonal boron nitride sheets

Minsu Kim, Kyung Yeol Ma, H. Shin
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引用次数: 2

Abstract

Hexagonal boron nitride (hBN) has a two-dimensional planar structure without dangling bonds and is considered an insulator material that can overcome the limitations of SiO2 and HfO2, which typically exhibit large densities of dangling bonds and charged impurities at the interface. However, most of the reported hBN films prepared by chemical vapor deposition (CVD) are polycrystalline with grain boundaries. The grain boundaries of a polycrystalline hBN cause current leakage and gas permeability. A recent notable study reports the growth of wafer-scale single-crystal hBN monolayer, which could mitigate the aforementioned problems caused by polycrystalline hBN films. In this perspective, we discuss the recent progress in the research on single-crystal hBN and the direction to be taken for single-crystal hBN in future. The progress is closely related to the development of a single-crystal substrate and large area of monolayer single-crystal was grown on Cu (111). In terms of the hBN growth, the next step would be to grow multilayer single-crystal hBN, which is expected to expand the scope of applications.
晶圆尺度单晶六方氮化硼片的生长研究
六方氮化硼(hBN)具有二维平面结构,没有悬空键,被认为是一种可以克服SiO2和HfO2的局限性的绝缘体材料,后者通常在界面处表现出大密度的悬空键和带电杂质。然而,已有报道的化学气相沉积(CVD)制备的hBN薄膜大多是具有晶界的多晶。多晶hBN的晶界引起电流泄漏和气体渗透性。最近一项值得注意的研究报道了硅片尺度的单晶hBN单层的生长,这可以减轻多晶hBN膜所带来的上述问题。从这一角度讨论了近年来单晶hBN的研究进展以及单晶hBN今后的发展方向。这一进展与单晶衬底的发展密切相关,在Cu(111)上生长了大面积的单层单晶。在hBN的增长方面,下一步将是生长多层单晶hBN,这有望扩大应用范围。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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CiteScore
6.40
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